JPH0455355B2 - - Google Patents
Info
- Publication number
- JPH0455355B2 JPH0455355B2 JP59281382A JP28138284A JPH0455355B2 JP H0455355 B2 JPH0455355 B2 JP H0455355B2 JP 59281382 A JP59281382 A JP 59281382A JP 28138284 A JP28138284 A JP 28138284A JP H0455355 B2 JPH0455355 B2 JP H0455355B2
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- piezoelectric
- beams
- vertical
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 37
- 239000000463 material Substances 0.000 claims description 9
- 230000008602 contraction Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59281382A JPS61150287A (ja) | 1984-12-24 | 1984-12-24 | 圧電体変位装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59281382A JPS61150287A (ja) | 1984-12-24 | 1984-12-24 | 圧電体変位装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61150287A JPS61150287A (ja) | 1986-07-08 |
JPH0455355B2 true JPH0455355B2 (en]) | 1992-09-03 |
Family
ID=17638357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59281382A Granted JPS61150287A (ja) | 1984-12-24 | 1984-12-24 | 圧電体変位装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61150287A (en]) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63265573A (ja) * | 1987-04-22 | 1988-11-02 | Agency Of Ind Science & Technol | 微小位置決め装置 |
JPH01112068U (en]) * | 1988-01-22 | 1989-07-27 | ||
US5780956A (en) * | 1996-11-12 | 1998-07-14 | Meritor Light Vehicle Systems, Inc. | Rotary piezoelectric motor for vehicle applications |
JP3965515B2 (ja) | 1999-10-01 | 2007-08-29 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
US6455981B1 (en) | 1999-10-01 | 2002-09-24 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and method of manufacturing same |
US6548938B2 (en) * | 2000-04-18 | 2003-04-15 | Viking Technologies, L.C. | Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator |
JP4321034B2 (ja) * | 2002-10-16 | 2009-08-26 | パナソニック株式会社 | 圧電アクチュエータおよびディスク装置 |
-
1984
- 1984-12-24 JP JP59281382A patent/JPS61150287A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61150287A (ja) | 1986-07-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0867043B1 (en) | Metal-electroactive ceramic composite transducers | |
KR100809712B1 (ko) | 압전 액튜에이터 | |
JPH10136665A (ja) | 圧電アクチュエータ | |
JPH0455355B2 (en]) | ||
US5517074A (en) | Piezoelectric actuator device | |
JPH0438152B2 (en]) | ||
JPS62272575A (ja) | 圧電アクチユエ−タ | |
JPH0320910B2 (en]) | ||
KR100280257B1 (ko) | 압전/전왜 액츄에이터 | |
JPH03283580A (ja) | 変位拡大機構付圧電アクチュエータ | |
JPS61148886A (ja) | 圧電体変位装置 | |
JPH0746908B2 (ja) | 位置決め装置 | |
JPS5930543Y2 (ja) | 積層型電歪駆動装置 | |
JPH0639468Y2 (ja) | セラミックスアクチュエータ | |
JPS61285424A (ja) | 光ビ−ム偏向器 | |
JPS63260085A (ja) | 圧電アクチュエータ | |
JPH0739252Y2 (ja) | 圧電アクチュエータ | |
JPH0479155B2 (en]) | ||
JPH0132750Y2 (en]) | ||
JPH0322869A (ja) | 圧電アクチュエータ | |
JPH0453009Y2 (en]) | ||
JPH0453008Y2 (en]) | ||
JPH0746909B2 (ja) | 位置決め装置 | |
JPH04274503A (ja) | 平行バネ機構の制御方法 | |
US20050145606A1 (en) | Low cost actuator with 2 dimensional motion |